SiC MEMS Pressure Sensors: Technology, Applications and Markets
SiC MEMS Pressure Sensors: Technology, Applications and Markets
Silicon Carbide: Material Platform for Harsh Environment Solutions Silicon carbide (SiC) has been used for many conventional applications that require mechanical and chemical stability at high temperatures. Mechanical stability is defined as the ability of a particular material to preserve its mechanical properties – elasticity, fracture toughness, hardness – at temperatures below and above room temperature.
Chemical stability is similarly defined as the ability of a particular material to preserve its composition at temperatures below and above room temperature. For high temperature applications, mechanical properties tend to deteriorate and chemical stability is compromised as corrosion processes occur.
Any material that can overcome these mechanical and chemical limitations becomes a candidate for what are called “harsh environment” applications. Harsh environment means a combination of media properties that can interact with the exposed material and alter its originally intended behavior. Harsh environments can be classified in three broad categories: 1) mechanically aggressive: high loads, vibration, shock; 2) thermally aggressive: high temperature; and 3) chemically aggressive: corrosive media.
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