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SiC MEMS Pressure Sensors: Technology, Applications and Markets

Silicon Carbide: Material Platform for Harsh Environment Solutions Silicon carbide (SiC) has been used for many conventional applications that require mechanical and chemical stability at high temperatures. Mechanical stability is defined as the ability of a particular material to preserve its mechanical properties – elasticity, fracture toughness, hardness – at temperatures below and above room temperature.

Chemical stability is similarly defined as the ability of a particular material to preserve its composition at temperatures below and above room temperature. For high temperature applications, mechanical properties tend to deteriorate and chemical stability is compromised as corrosion processes occur.

Any material that can overcome these mechanical and chemical limitations becomes a candidate for what are called “harsh environment” applications. Harsh environment means a combination of media properties that can interact with the exposed material and alter its originally intended behavior. Harsh environments can be classified in three broad categories: 1) mechanically aggressive: high loads, vibration, shock; 2) thermally aggressive: high temperature; and 3) chemically aggressive: corrosive media.

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The all new LandMark20 MEMS IMU is a silicon low noise digital Inertial Measurement Unit (IMU) that provides internally temperature compensated RS485 output of delta velocity and delta theta.
Features:

• Low Noise Silicon MEMS Digital IMU
• Low Gyro Noise 0.028º/sec/?Hz
• Fully Temperature Compensated Bias and Scale Factor
• Compensated G-Sensitivity and Misalignment
• In Run Gyro Bias 6° to 60°/hour typical
• Low Power < 1/2 watt typical
• Light Weight 113 grams
• Small Size < 67.5cm3/4.1in3
• Low Voltage +3.0 to 4.2V (single sided power)
• Bandwidth 100 Hz (user selectable)
• RS485 Output 200 Hz (user selectable)
• Bandwidth Filtering Capability
• Vibration Isolation
• Precision Alignment
• 3 Internal Temp. Sensors
• Self Test
• Shock Resistant
• Long Life
• Export Classification: Commerce ECCN7A994 Pending

The LandMark20 IMU is ideal for applications requiring improved performance MEMS gyros, but also needing ultra low power consumption, small size, light weight and no inherent wear out modes for long life. The signature feature of the LandMark20 IMU is the improved gyro performance. The low noise gyros enable precision measurement and improved in-run and bias over temperature. The IMU’s performance is optimized with fully temperature compensated bias and scale factor and compensated misalighnment and g-sensitivity. The rate outputs are free from bias steps and linear outputs are without acceleration hysteresis. The unit is highly durable and can withstand environmental vibration and shock typically associated with commerical aircraft requirements.

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